Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

Conference paper (2022)

Authors

L.N. Sacco Electronic Components, Technology and Materials - EEMCS
Hanxing Meng Student
S. Vollebregt Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2022 L.N. Sacco, Hanxing Meng, S. Vollebregt
DOI: https://doi.org/10.1109/SENSORS52175.2022.9967039
More Info
expand_more

Published Date

2022

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device to humidity levels in the range of 10% to 84% of relative humidity (RH). Both MLG strips present a linear response over this range. The micro-heater implementation is vital to fully desorb water molecules from the MLG surface. The micro-heater was powered with 31 mW to reach 140°C in the MHP zone. The sensitivity of the devices is of the order of 1000 pp/RH[%]. The developed device aims at providing a robust and reliable gas sensors platform based on MLG.

Files

Humidity_sensor_based_on_multi... (pdf)
(pdf | 1.46 Mb)
- Embargo expired in 08-06-2023
Unknown license