Damage after annealing and aging at room temperature of platinized silicon substrates

Moret, MP; Devillers, MAC; Tichelaar, FD; Aret, E; Hageman, PR; Larsen, PK

Damage after annealing and aging at room temperature of platinized silicon substrates

Journal article (2003)

Authors

MP Moret External organisation

MAC Devillers External organisation

FD Tichelaar

E Aret External organisation

PR Hageman External organisation

PK Larsen External organisation

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Published Date

2003

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