Poly-silicon films with low impurity concentrtion made by hot wire chemical vapour deposition.

Journal article (2001)

Authors

REI Schropp External organisation
P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
JK Rath External organisation
Research Group
Old - sect Electronic Materials (NS/EM)
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - sect Electronic Materials (NS/EM)