Static capacitive pressure sensing using a single graphene drumg

Journal article (2017)

Authors

D. Davidovikj QN/Steeneken Lab - , Kavli institute of nanoscience Delft

P.H. Scheepers Kavli institute of nanoscience Delft, EKL-Users -

H.S.J. van der Zant Kavli institute of nanoscience Delft, QN/van der Zant Lab -

P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - , Kavli institute of nanoscience Delft

Research Group

QN/Steeneken Lab () (TU Delft)

DOI: https://doi.org/10.1021/acsami.7b17487

Nanomechanics Two-dimensional materials Pressure sensor Graphene drum Minimizing parasitic capacitance Static capacitive readout

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Published Date

2017

Language

English

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Steeneken Lab

Abstract

To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.

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