BiCMOS Integrated Waveguide with Artificial Dielectric at Submillimeter Wave Frequencies

Conference paper (2016)

Authors

M. Alonso Del Pino Electronics -

H. Thippur Shivamurthy Electronics -

D. Cavallo Tera-Hertz Sensing -

L. Galatro Electronics -

M. Spirito Electronics -

Research Group

Electronics () (TU Delft)

BiCMOS Submillimeter-wave Integrated waveguide Ificial dielectric (AD)

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http://resolver.tudelft.nl/uuid:ed793fa0-01bb-4d30-b60d-5c8ca4cd0eb2

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Published Date

11-08-2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

In this paper we present a synthetic waveguide integrated in a commercial BiCMOS back-end-of-line, employing artificial dielectrics (ADs) to reduce the component size. The AD is realized by employing floating pillars using the various layers available in the technology, thus fulfilling metal density rule and boosting the effective permittivity of the host medium (i.e., SiO2) to 12.5. The impact of the AD translates in a 56% width reduction of the waveguide, for the same cutoff frequency. The structure provides 1.6dB of losses per guide wavelength (λg) at 300GHz and more than 30dB suppression below 180GHz, avoiding the need of filters in multiplication stages.