Precursor utilization in atomic layer deposition on nanostructured materials in fluidized bed reactors

Abstract (2014)

Authors

F. Grillo ChemE/Product and Process Engineering - AS
M.T. Kreutzer ChemE/Product and Process Engineering - AS
Ruud van Ommen ChemE/Product and Process Engineering - AS
Research Group
ChemE/Product and Process Engineering (AS) (TU Delft)
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Published Date

2014

Language

English

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Faculty

Applied Sciences

Department

ChemE/Chemical Engineering

Research Group

ChemE/Product and Process Engineering