A novel heterodyne displacement interferometer with no detactable periodic nnlinearity and optical resolution doubling

Joo, K; Ellis, J.D.; Buice, ES; Spronck, J.W.; Munnig Schmidt, R.H.

A novel heterodyne displacement interferometer with no detactable periodic nnlinearity and optical resolution doubling

Conference paper (2010)

Authors

K Joo Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.D. Ellis Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

ES Buice Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2010

Language

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design