Low temperature Wafer-Level Packaging of RF-MEMS using SU-8 printing

Conference paper (2005)

Authors

J. Tian Old - EWI Ch. Integrated Sensing Devices
M. Bartek Old - EWI Ch. Integrated Sensing Devices
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2005

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices