A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Derakhshandeh Kheljani, J.; Tajari Mofrad, M.R.; Ishihara, R.; van der Cingel, J.; Beenakker, C.I.M.

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Conference paper (2008)

Authors

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials -

M.R. Tajari Mofrad Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

J. van der Cingel Old - EWI Sect. ECTM

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2008

Language

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials