A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Derakhshandeh Kheljani, J.; Tajari Mofrad, M.R.; Ishihara, R; van der Cingel, J.; Beenakker, C.I.M.

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Conference paper (2008)

Authors

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials

M.R. Tajari Mofrad Electronic Components, Technology and Materials

R Ishihara Electronic Components, Technology and Materials

J. van der Cingel Old - EWI Sect. ECTM

C.I.M. Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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