The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

Vollebregt, Sten; Banerjee, S; Tichelaar, F.; Ishihara, R.

The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias

Journal article (2016)

Authors

Sten Vollebregt Electronic Components, Technology and Materials

S Banerjee External organisation

F. Tichelaar

R. Ishihara Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2016

Language

English

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Research Group

Electronic Components, Technology and Materials

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