Accurate small-scale manipulation

Journal article (2015)

Authors

Bram Krijnen University of Twente
Dannis M. Brouwer University of Twente
Leon Abelmann University of Twente, Korean Institute of Science and Technology - Europe
J.L. Herder University of Twente, Precision and Microsystems Engineering , Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2015 Bram Krijnen, Koen Swinkels, Dannis M. Brouwer, Leon Abelmann, J.L. Herder
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

A 3-DoF micro-electromechanical (MEMS) stage has been designed with an innovative integrated feedback system based on thermal sensors. The stage is integrated in the device layer of a silicon-oninsulator-wafer, which means that no assembly is required and the stage can be fabricated using only a single mask. The range of motion is over 160 μm in two directions and 325 mrad of rotation, which exceeds the range of motion of existing MEMS stages by far.

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