Fiber coupled sub nanometer displacement interferometry without periodic nonlinearity

Conference paper (2011)

Authors

A.J.H. Meskers Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.D. Ellis Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2011

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

Displacement interferometers are widely used in precision engineering and metrology applications. For multi-axis systems, free space delivery of the optical beams requires high tolerance pointing stability and couples the source to the interferometer location. Fiber delivery is desired to decouple the source and interferometer but configurations which have to be used for this, contribute typical errors such as periodic nonlinearity. In this paper, we describe a fiber-coupled Joo-type interferometer. Spatial separation of the input beams in this type of interferometer eliminate periodic nonlinearities. This is contrasted by typical heterodyne interferometer systems which have two orthogonal, coaxial beams with a difference frequency. We present the interferometer design,
discuss the fiber deployment, and compare free-space and fiber-coupled versions. The results indicate that fiberinduced disturbances are rejected as theory predicts and no periodic nonlinearity was detected.