Planarized nanophotonic sensor for real-time fluid sensing

Abstract

A planarized on-chip nanophotonic sensor based on a photonic crystal cavity is realized in this work. The sensor was embedded in a solid protecting material (flowable oxide) with perfect filled holes: this eliminates problems of fouling in practical applications. The functional area of the sensor is created by carefully removing the protecting material only on the top surface of the cavity. A wavelength shift of 7.5 nm was observed in experiment which is very close to a simulation result of 9.0 nm for sensing water (n=1.33) and crude oil (n=1.45) samples. Swift and accurate sensing was verified by a real-time dynamic measurement with rapidly alternating analytes in a microfluid channel.