Corrugated (2 × 2) silicon platelets horn antenna array at 560 GHz

Conference paper (2017)

Authors

Choonsup Lee California Institute of Technology
David Gonzalez-Ovejero CentraleSupelec-IETR UMR 6164
M. Alonso Del Pino California Institute of Technology
Theodore J. Reck California Institute of Technology
Alejandro Peralta California Institute of Technology
Imran Mehdi California Institute of Technology
Goutam Chattopadhyay California Institute of Technology
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Published Date

12-10-2017

Language

English

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Abstract

We designed and microfabricated a (2×2) silicon platelet horn antenna at 560 GHz, which is the highest frequency ever among silicon corrugated horn antennas. This was enabled by a silicon compression pin alignment technique of which inaccuracy is less than ± 2 μm in layer-to-layer. The simulation results show that the return loss and gain across the operation frequency of 490-600 GHz are approximately 25 dB and 22 dBi, respectively. The cross-polarization level is below -40 dB. The feature of batch processing will enable us simultaneously to build hundreds or thousands of horn antennas.