New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapour deposition

van Swaaij, R.A.C.M.M.; Jimenez Zambrano, R; Smit, C; van de Sanden, MCM

New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapour deposition

Journal article (2006)

Authors

R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials

R Jimenez Zambrano Electronic Components, Technology and Materials

C Smit Electronic Components, Technology and Materials

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2006

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Research Group

Electronic Components, Technology and Materials

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