New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapour deposition

van Swaaij, R.A.C.M.M.; Jimenez Zambrano, R; Smit, C; van de Sanden, MCM

New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapour deposition

Journal article (2006)

Authors

R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials -

R Jimenez Zambrano Electronic Components, Technology and Materials -

C Smit Electronic Components, Technology and Materials -

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:e0cf236d-9620-4c2d-b909-3c93cd1cf4c6

More Info

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Published Date

2006

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials