Passive photonic alignment with submicrometer repeatability and accuracy

van Gurp, J.F.C.; Tichem, M.; Staufer, U.; Zhao, J Zhao

Passive photonic alignment with submicrometer repeatability and accuracy

Journal article (2013)

Authors

J.F.C. van Gurp Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

J Zhao Zhao External organisation

Research Group

Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

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http://resolver.tudelft.nl/uuid:dd257d5a-3896-4cb7-9439-a71bc8ff6600

More Info

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Published Date

2013

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering