The uniformity of APCVD SiGe layers with high Ge concentration

Conference paper (1998)

Authors

J Shi External organisation
K Grimm External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
C.C.G. Visser Electronic Components, Technology and Materials - EEMCS
A van den Boogaard External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

1998

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials