Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

van Dorp, W.F.; van Someren, B; Hagen, C.W.; Kruit, P.; Crozier, P.A.

Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

Journal article (2006)

Authors

W.F. van Dorp ImPhys/Charged Particle Optics

B van Someren ImPhys/Charged Particle Optics

C.W. Hagen ImPhys/Charged Particle Optics

P. Kruit ImPhys/Charged Particle Optics

P.A. Crozier External organisation

Research Group

ImPhys/Charged Particle Optics

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Published Date

2006

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Research Group

ImPhys/Charged Particle Optics