An optical in-plane displacement measurement technique with sub-nanometer accuracy based on curve-fitting

Conference paper (2014)

Authors

J. Kokorian Micro and Nano Engineering
F. Buja Micro and Nano Engineering
U. STAUFER Micro and Nano Engineering
Merlijn van Spengen Micro and Nano Engineering
Research Group
Micro and Nano Engineering
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Published Date

2014

Language

English

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Research Group

Micro and Nano Engineering

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