Ion Beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source

Journal article (2011)

Authors

D.S. Jun ImPhys/Charged Particle Optics
VG Kutchoukov ImPhys/Charged Particle Optics
P Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2011

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics