Graphene deposition on MEMS devices

Abstract

MEMS devices are currently designed to avoid sliding and contacting parts due to friction and adhesion problems. In this work, the possibility to grow a low friction material locally on MEMS sidewalls is investigated. An overview of the lubricants proposed in the literature for the microscale is presented, and graphene is selected as a promising and appropriate material for MEMS lubrication. Until now graphene is often transferred to surfaces, but for MEMS purposes a transfer step is not always possible. Chemical vapor deposition is selected as the appropriate technique for depositing graphene directly on MEMS sidewalls. In the deposition experiments, graphene is deposited using hydrogen, methane, a nickel catalyst, and a high temperature through Joule heating. The number of graphene layers and the quality of graphene is assessed by micro-Raman spectroscopy. The experiments revealed that it is possible to deposit graphene locally on the top and sidewalls of MEMS structures. The results of this report can be used for further research into graphene lubrication on MEMS surfaces, and it contributes to the development of a new field of MEMS devices with sliding and contacting structures with reduced friction and wear.