Nanolithography in an environmental scanning transmission electron microscope

van Dorp, W.F.; Hagen, C.W.; Crozier, P.A.; van Someren, B; Kruit, P.

Nanolithography in an environmental scanning transmission electron microscope

Conference paper (2005)

Authors

W.F. van Dorp ImPhys/Charged Particle Optics

C.W. Hagen ImPhys/Charged Particle Optics

P.A. Crozier External organisation

B van Someren ImPhys/Charged Particle Optics

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

To reference this document use:

http://resolver.tudelft.nl/uuid:d900fbd0-51e2-4af1-ae59-04ef0e0dc70b

More Info

expand_more

Published Date

2005

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Charged Particle Optics