Automated Contacting of On-Wafer Devices for RF Testing

Mubarak, F.A.; De Martino, C.; Toskovic, R.; Rietveld, Gert; Spirito, M.

Automated Contacting of On-Wafer Devices for RF Testing

Conference paper (2020)

Authors

F.A. Mubarak VSL Dutch Metrology Institute, Electronics -

C. De Martino Electronics -

R. Toskovic VSL Dutch Metrology Institute

Gert Rietveld VSL Dutch Metrology Institute

M. Spirito Electronics -

Research Group

Electronics () (TU Delft)

Uncertainty Measurement uncertainty Measurement techniques Microwave measurements On-wafer contacting On-wafer probing Precision measurements

To reference this document use:

http://resolver.tudelft.nl/uuid:d8894391-9833-4262-baa0-f23d9a6bf336

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Published Date

2020

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

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