A 40-nm CMOS Permittivity Sensor for Chemical/Biological Material Characterization at RF/Microwave Frequencies

Conference paper (2016)

Authors

G. Vlachogiannakis Electronics -

M. Spirito Electronics -

M.A.P. Pertijs Electronic Instrumentation -

L.C.N. de Vreede Electronics -

Research Group

Electronics () (TU Delft)

CMOS integrated circuits Permittivity Bridge circuits Chemical and biological sensors Microwave sensors

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Published Date

2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

This paper presents a complex permittivity sensor, integrated in 40-nm CMOS, for microwave dielectric spectroscopy. It utilizes a single-ended patch as a near-field sensing element, embedded in a double-balanced, fully-differential impedance bridge. A low-IF, multi-harmonic down-conversion scheme is employed to extend the characterization frequency range and increase the measurement speed. The implemented architecture is compact, accurate and fast, thus suitable for the realization of future real-time, microwave-based, 2-D dielectric imagers. Measurements on liquids show an rms error of <;1% over a frequency range of 0.1 - 12 GHz.