Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.

Munteanu, D; van Landschoot, N; Schoonman, Joop; Munteanu, A

Characterization of TiN, Ti(C,N) and (Ti,Al)N thin films coated via PECVD on tool steels.

Conference paper (2001)

Authors

D Munteanu External organisation

N van Landschoot Old - sect Laboratory Inorganic Chemistry (DCT/AC)

Joop Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)

A Munteanu External organisation

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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Published Date

2001

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)

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