Solar cells with intrinsic a-Si: H deposited at rates larger than 5 Å/s by the expanding thermal plasma

Korevaar, BA; Smit, C; van Swaaij, Rene; Smets, AHM; Kessels, Wilhelmus M.M.; Metselaar, JW; Schram, DC; van de Sanden, MCM

Solar cells with intrinsic a-Si: H deposited at rates larger than 5 Å/s by the expanding thermal plasma

Conference paper (2000)

Authors

BA Korevaar External organisation

C Smit Electronic Components, Technology and Materials

Rene van Swaaij Electronic Components, Technology and Materials

AHM Smets External organisation

Wilhelmus M.M. Kessels External organisation

JW Metselaar Electronic Components, Technology and Materials

DC Schram External organisation

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials

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Published Date

2000

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Research Group

Electronic Components, Technology and Materials

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