Integration of a high-NA light microscope in a scanning electron microscope

Zonnevylle, A.C.; van Tol, RFC; Liv Hamarat, N.; Narvaez, AC; Effting, APJ; Kruit, P.; Hoogenboom, Jacob P.

Integration of a high-NA light microscope in a scanning electron microscope

Journal article (2013)

Authors

A.C. Zonnevylle ImPhys/Charged Particle Optics

RFC van Tol External organisation

N. Liv Hamarat ImPhys/Charged Particle Optics

AC Narvaez External organisation

APJ Effting External organisation

P. Kruit ImPhys/Charged Particle Optics

Jacob P. Hoogenboom ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

To reference this document use:

http://resolver.tudelft.nl/uuid:d5b2b7f5-ecb8-468d-aa16-1fee40b5a093

More Info

expand_more

Published Date

2013

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Charged Particle Optics