Integration of a high-NA light microscope in a scanning electron microscope

Journal article (2013)

Authors

A.C. Zonnevylle ImPhys/Charged Particle Optics
RFC van Tol External organisation
N. Liv Hamarat ImPhys/Charged Particle Optics
AC Narvaez External organisation
APJ Effting External organisation
P. Kruit ImPhys/Charged Particle Optics
J.P. Hoogenboom ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2013

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics