Reducing residual vibrations through iterative learning control with application to a wafer stage

van Oosten, CL; Bosgra, O.H.; Dijkstra, BG

Reducing residual vibrations through iterative learning control with application to a wafer stage

Conference paper (2004)

Authors

CL van Oosten External organisation

O.H. Bosgra DISC

BG Dijkstra DISC

Research Group

DISC

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Published Date

2004

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Research Group

DISC

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