Reducing residual vibrations through iterative learning control with application to a wafer stage

Conference paper (2004)

Authors

CL van Oosten External organisation
O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering
BG Dijkstra DISC - Mechanical, Maritime and Materials Engineering
Research Group
DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)
More Info
expand_more

Published Date

2004

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC