Comparison of numerical methods for transient CVD simulations

Journal article (2007)

Authors

S van Veldhuizen Numerical Analysis - EEMCS
Cornelis Vuik Numerical Analysis - EEMCS
C.R. Kleijn MSP/Thermal & Materials Processes
Research Group
Numerical Analysis (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Delft Institute of Applied Mathematics

Research Group

Numerical Analysis