Modeling the precursor utilization in atomic layer deposition on nanostructured materials inn fluidized bed reactors

Journal article (2015)

Authors

F. Grillo ChemE/Product and Process Engineering - AS
M.T. Kreutzer ChemE/Product and Process Engineering - AS
Ruud van Ommen ChemE/Product and Process Engineering - AS
Research Group
ChemE/Product and Process Engineering (AS) (TU Delft)
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ChemE/Chemical Engineering

Research Group

ChemE/Product and Process Engineering