Fabrication and characterization of low pressure micro-resistojets with integrated heater and temperature measurement

Abstract

Three low pressure micro-resistojets (LPM) with integrated heater and temperature measurement were designed, manufactured and characterized at Delft university of technology. The devices were manufactured using silicon-based micro electro mechanical systems (MEMS) technology including a heater made of molybdenum for better operations at high temperature. The resistace of the heaters is used to estimate the chip temperature giving them a double function as heater and sensor simultaneously. The manufacturing steps are described in detail. A special interface was manufactured to hold the MEMS device considering the mechanical and electrical aspects. The MEMS devices are characterized for three different aspects: mechanical, electrical and propulsion. The three designed devices were tested mechanically and electrically, and one design was tested in terms of propulsion performance in a near-operational condition. The tests are promising and open the path to design a flight demonstration model.