Galvanic etching of silicon for fabrication of micromechanical structures

Doctoral thesis (2000)

Authors

CMA Ashruf Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation