MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications

Doctoral thesis (2011)

Authors

M. Mihailovic Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials