SEM measurements of the thickness of layers on silicon wafers

Report (2002)

Authors

J Kiersch OLD Virtual Materials and Mechanics
W. G. Sloof OLD Virtual Materials and Mechanics
Research Group
OLD Virtual Materials and Mechanics
More Info
expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

OLD Virtual Materials and Mechanics