Nanometer-Scale Height Measurements in Micromachined Picoliter Vials based on Interference Fringe Analysis.

Conference paper (2000)

Authors

LR van den Doel ImPhys/Quantitative Imaging
L.J. Van Vliet ImPhys/Quantitative Imaging
KT Hjelt ImPhys/Quantitative Imaging
MJ Vellekoop Electronic Instrumentation - EEMCS
F Gromball External organisation
JG Korvink External organisation
I.T. Young ImPhys/Quantitative Imaging
Research Group
ImPhys/Quantitative Imaging
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Published Date

2000

Language

Undefined/Unknown

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Research Group

ImPhys/Quantitative Imaging