Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems

Conference paper (1996)

Authors

M Caymax External organisation
L Vescan External organisation
K Werner QN/Fysics of NanoElectronics
D Bensahel External organisation
D Gravestijn External organisation
I Szendró External organisation
Research Group
QN/Fysics of NanoElectronics
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Published Date

1996

Language

Undefined/Unknown

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Research Group

QN/Fysics of NanoElectronics