As peaks in Si (100) films fabricated with rapid thermal epitaxy

van Noort, WD; Nanver, L.K.; Visser, C.C.G.; van den Bogaard, A.; Slotboom, JW

As peaks in Si (100) films fabricated with rapid thermal epitaxy

Conference paper (1999)

Authors

WD van Noort Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

C.C.G. Visser Electronic Components, Technology and Materials -

A. van den Bogaard Electronic Components, Technology and Materials -

JW Slotboom Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials