High resolution heterodyne interferometer without detectable periodic nonlinearity.

Journal article (2010)

Authors

K Joo Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.D. Ellis Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

ES Buice Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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http://resolver.tudelft.nl/uuid:c7672358-00f1-46d5-90d4-67dcddac23a9

More Info

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Published Date

2010

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design