Influence of ICP etching on surface morphology of InP substrates

Conference paper (2004)

Authors

F Karouta External organisation
EJ Geluk External organisation
RW van der Heijden External organisation
AYu Silov External organisation
T Eijkermans External organisation
JJGM van der Tol External organisation
MK Smit External organisation
H.W.M. Salemink QN/Afdelingsbureau
Research Group
QN/Afdelingsbureau
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Published Date

2004

Language

Undefined/Unknown

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Research Group

QN/Afdelingsbureau

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