FinFET technology for wide-channel devices with ultra-thin silicon body

Jovanovi¿, V; Suligoj, T; Biljanovi¿, P; Nanver, L. K.

FinFET technology for wide-channel devices with ultra-thin silicon body

Conference paper (2008)

Authors

V Jovanovi¿ External organisation

T Suligoj External organisation

P Biljanovi¿ External organisation

L. K. Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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