Silicon nitride nanosieve membrane

Journal article (2004)

Authors

HD Tong External organisation
HV Jansen External organisation
VJ Gadgil External organisation
CG Bostan External organisation
E Berenschot External organisation
CJM van Rijn Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
M Elwenspoek External organisation
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics