Microwave mobility in profiled poly-Si thin films deposited on glass by hot-wire CVD

Journal article (2002)

Authors

PATT van Veenendaal External organisation
T.J. Savenije Old - Section Radiation Chemistry
JK Rath External organisation
REI Schropp External organisation
Research Group
Old - Section Radiation Chemistry
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Published Date

2002

Language

Undefined/Unknown

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Research Group

Old - Section Radiation Chemistry