Planer wafer transport and positioning on an air film using a viscous traction principle

Journal article (2009)

Authors

J van Rij Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Jasper Wesselingh Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
R. A.J. van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Jo Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
RH Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design