Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests

Journal article (2015)

Authors

F. Buja Micro and Nano Engineering
J. Kokorian Micro and Nano Engineering
R Gulotty Argonne National Laboratory
AV Sumant Argonne National Laboratory
Merlijn van Spengen Micro and Nano Engineering
Department
Precision and Microsystems Engineering
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Published Date

2015

Language

English

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Department

Precision and Microsystems Engineering

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