Microscale friction reduction by normal force modulation in MEMS

Journal article (2010)

Authors

Merlijn van Spengen Micro and Nano Engineering
GHCJ Wijts External organisation
V Turq External organisation
JWM Frenken External organisation
Research Group
Micro and Nano Engineering
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Published Date

2010

Language

English

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Research Group

Micro and Nano Engineering

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