Modelling of the Kinetics in Copper Chemical Vapour Deposition from Cu(hfac)VTMS

Journal article (1999)

Authors

MLH ter Heerdt External organisation
JJ Overdijk External organisation
PJ van der Put External organisation
J Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
More Info
expand_more

Published Date

1999

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)