Low-cost system for measuring plasma resistance

Conference paper (2001)

Authors

BP Iliev Electronic Instrumentation - EEMCS
GAM Pop External organisation
G.C.M. Meijer Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation