Microcolumn design for a large scan field and pixel number

Journal article (2009)

Authors

H. Weigand External organisation
S. Gautsch External organisation
W. Strohmaier External organisation
M. Fleischer External organisation
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering