A Compact Sensor Readout Circuit with Combined Temperature, Capacitance and Voltage Sensing Functionality

Conference paper (2017)

Authors

B. Yousefzadeh Electronic Instrumentation - EEMCS
Wei Wu Student
Berry Buter NXP Semiconductors
K.A.A. Makinwa Microelectronics
M. Pertijs Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2017

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This paper presents an area- and energy-efficient sensor readout circuit, which can precisely digitize temperature, capacitance and voltage. The three modes use only on-chip references and employ a shared zoom ADC based on SAR and ΔΣ conversion to save die area. Measurements on 24 samples from a single wafer show a temperature inaccuracy of ±0.2 °C (3σ) over the military temperature range (-55°C to 125°C). The voltage sensing shows an inaccuracy of ±0.5%. The sensor also offers 18.7-ENOB capacitance-to-digital conversion, which handles up to 3.8 pF capacitance with a 0.76 pJ/conv.-step energy-efficiency FoM. It occupies 0.33 mm in a 0.16 μm CMOS process and draws 4.6 μA current from a 1.8 V supply.

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