Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

Conference paper (2014)

Authors

Sangeetha Hari ImPhys/Charged Particle Optics
Kees Hagen ImPhys/Charged Particle Optics
T. Verduin ImPhys/Charged Particle Optics
Pieter Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

2014

Language

English

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Research Group

ImPhys/Charged Particle Optics

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